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UW-MEMS Process Design Handbook Version 3

 

The Center for Integrated RF Engineering (CIRFE) was conceived through the establishment of the NSERC Industrial Research Chair on Radio Frequency (RF) Engineering in 2000 at the Electrical and Computer Engineering Department, University of Waterloo.  Today, the CIRFE Center has a research group consisting of 20 Ph.D and M.Sc graduate students, research engineers and postdoctoral fellows. It houses a new state-of-the-art RF test and characterization laboratory and a new clean room.    

The focus of the CIRFE Center’s research activities is on emerging RF technologies including RF Micro-Electro-Mechanical Systems (MEMS), miniature RFID, wireless intelligent systems, filters & multiplexers, superconductivity, novel materials, computer-aided circuit diagnosis, simulation and modeling.  The uniqueness of the CIRFE Center lies in the ability to integrate various RF technologies and in its wide range of capabilities, which include research, development, modeling, design, fabrication, packaging and test. 

The mission of the CIRFE Center is three-fold:

  1. To be a premier source of innovation, creativity and expertise in RF engineering.
  2. To provide a facility, stimulating environment and necessary training for graduate students to successfully pursue a rewarding career in RF and other interdisciplinary engineering fields.
  3. To develop and foster collaborative research with industry encouraging cross-fertilization of ideas and promoting technology transfer.